Studying an influence of a nucleation phase on nanocrystalline diamond film properties

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Authors	KARÁSKOVÁ Monika ZAJÍČKOVÁ Lenka JAŠEK Ondřej BURŠÍKOVÁ Vilma FRANTA Daniel MATĚJKOVÁ Jiřina KLAPETEK Petr
Year of publication	2007
Type	Article in Periodical
Magazine / Source	Acta Metallurgica Slovaca
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	nanokrystalline diamond; plasma enhanced CVD; bias enhanced nucleation; hardness
Description	In the present paper we studied influence of a nucleation phase on nanocrystalline diamond film properties. We determined the mechanical and optical properties of the prepared samples. The surface was studied using AFM and HRSEM techniques.
Related projects:	Synthesis of carbon micro- and nanostructures by plasma technologies Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Nanometrologie využívající metod rastrovací sondové mikroskopie