Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Proceedings |
| Conference | 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | TVA;tungsten;mechanical properties |
| Description | Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode |
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