Thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ZŮDA Jaroslav BURŠÍKOVÁ Vilma ČECH Jan SŤAHEL Pavel
Year of publication	2005
Type	Article in Proceedings
Conference	JUNIORMAT'05
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Thermal stability; diamond like carbon; thin films; plasma enhanced chemical vapor deposition
Description	In this work the thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition was studied.
Related projects:	Plasmachemical modification of natural polymers based on cellulose in atmospheric pressure surface or coplanar barrier discharge Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials