Theoretical analysis of the atomic force microscopy characterization of columnar thin films

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Authors	KLAPETEK Petr OHLÍDAL Ivan
Year of publication	2003
Type	Article in Periodical
Magazine / Source	Ultramicroscopy
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	columnar films; atomic force microscopy
Description	In this paper a theoretical analysis of atomic force microscopy measurements of columnar thin films is presented. Errors originating from tip convoution effects are evaluated.
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