Rf sputtering of composite SiOx/plasma polymer films and their basic properties

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Authors	CHOUKOUROV A. PIHOSH Y. STELMASHUK V. BIEDERMAN Hynek SLAVÍNSKÁ D. KORMUNDA M. ZAJÍČKOVÁ Lenka
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Surface & coatings technology
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Rf magnetron; sputtering; SiOx; plasma polymer films
Description	Rf sputtering of composite SiOx/plasma polymer films and their basic properties
Related projects:	Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates