Comparison of optical and non-optical methods for measuring surface roughness

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Authors	OHLÍDAL Ivan OHLÍDAL Miloslav FRANTA Daniel TYKAL Miroslav
Year of publication	1999
Type	Article in Proceedings
Conference	Proceedings of SPIE 3820, 11th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
MU Faculty or unit	Faculty of Science
Citation
web	http://hydra.physics.muni.cz/~franta/bib/SPIE3820_456.html
Field	Solid matter physics and magnetism
Keywords	Coherent optics; Surface roughness; Metrology
Description	The values of the basic characteristics of surface roughness measured by means of optical and non-optical methods often differ mutually. So far a systematic comparison of the results obtained by those methods has not been done. The results we have achieved comparing optical and non-optical methods of the surface roughness measurement for selected samples of rough surfaces and for selected methods are presented.
Related projects:	Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Characterization of multilayer systems with randomly rough boundaries by means of optical and X - ray methods