Structural and Ferromagnetic Properties of Sputtered FeCoB/AlN Soft Magnetic Multilayers for GHz Applications

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	FALUB Claudiu Valentin HIDA Rachid MEDUŇA Mojmír ZWECK Josef MICHEL Jean-Philippe SIBUET Henri SCHNEIDER Daniel BLESS Martin RICHTER Jan H. ROHRMANN Hartmut
Year of publication	2017
Type	Article in Periodical
Magazine / Source	IEEE TRANSACTIONS ON MAGNETICS
MU Faculty or unit	Faculty of Science
Citation
web	http://ieeexplore.ieee.org/abstract/document/7924320/
Doi	https://doi.org/10.1109/TMAG.2017.2703175
Field	Solid matter physics and magnetism
Keywords	FeCoB; high-frequency permeability; magnetic multilayers; magnetron sputtering; soft magnetic materials
Description	In this paper, we studied the structural and magnetic properties of amorphous FeCoB/AlN multilayered thin films with in-plane uniaxial magnetic anisotropy based on the Fe-28% Co-20% B (at. %) alloy, deposited on 8 '' Si/200 nm-thermal-SiO2 wafers in an industrial, high-throughput magnetron sputtering system.
Related projects:	CEITEC - Central European Institute of Technology CEITEC - open access CEITEC 2020