Diffuse coplanar surface barrier discharge for cleaning and activation of glass substrate

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Authors	ŠTĚPÁNOVÁ Vlasta SKÁCELOVÁ Dana SLAVÍČEK Pavel ČERNÁK Mirko
Year of publication	2012
Type	Article in Periodical
Magazine / Source	Chem. listy
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	barrier discharge; DCSBD; plasma cleaning
Description	Diffuse coplanar surface barrier discharge - DCSBD was used for cleaning and activation of borosilicate glass substrates. Results was studed by AFM.
Related projects:	Surface modification of polymeric materials using non-equilibrium plasma generated by underwater pulsed high voltage discharges CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy