Comparison of nc-TiC/a-C:H coatings prepared by magnetron sputtering in well balanced and highly unbalanced magnetic field

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Authors	SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr BURŠÍK Jiří PEŘINA Vratislav PEI Yutao DE HOSSON Jeff Th.M.
Year of publication	2012
Type	Article in Proceedings
Conference	Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	magnetron sputtering; titanium carbide; nanocomposite
Description	nc-TiC/a-C:H coatings were prepare using a well balanced and highly unbalanced magnetron sputtering. Both series were found to show similar trends in mechanical and tribological properties depending only on the carbon content in the nc-TiC/a-C:H coatings.
Related projects:	Plazmochemické procesy a jejich technologické aplikace CEPLANT - Regionální VaV centrum pro nízkonákladové plazmové a nanotechnologické povrchové úpravy Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev