Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes

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Authors	ZELINA Peter KUDRLE Vít JAŠEK Ondřej
Year of publication	2011
Type	Article in Proceedings
Conference	Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	flow measurement; PECVD; Prandtl-Pitot tube; Iron pentacarbonyl
Description	In this work we present a method to measure gas flow where conventional mass flow-meters cannot be used. These are the cases when one operates with highly reactive gases, unstable substances or meets other difficulties. We successfully used Prandtl-Pitot tube for measurement of iron pentacarbonyl flow during the process of plasma synthesis of nanoparticles.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface