Morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process

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Authors	VAŠINA Petr SOUČEK Pavel SCHMIDTOVÁ Tereza BURŠÍKOVÁ Vilma SCHÄFER Jan
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This paper presents the morphological study of nanocrystalline TiC/a-C:H composites deposited by hybrid PVD-PECVD process.
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