Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr SOUČEK Pavel
Year of publication	2010
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Hybrid PVD-PECVD process: focusing on modelling and steady-state conditions. No hysteresis effect was observed and modelled.
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