Radial Structure of RF Discharge in Neon

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Authors	NAVRÁTIL Zdeněk TRUNEC David DVOŘÁK Pavel
Year of publication	2008
Type	Article in Proceedings
Conference	2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma; capacitive; neone; discharge; optical emmision spectroscopy
Description	Radial structure of low-pressure capacitive RF (13.56 MHz) discharge ignited in neon was studied by means of optical emmision spectroscopy.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Deposition of thin films in dielectric barrier discharges at atmospheric pressure