Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	HAVEL Josef BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	2007
Type	Article in Proceedings
Conference	Nanotechnologia analitica
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Artificial Neural Networks;DLC
Description	Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges