Efficient excimer source in rare gases/chlorine mixtures
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| Conference | 7th International Balkan Workshop on Applied Physics - Abstracts |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Surface Barrier Discharge; Excimer mixtures |
| Description | Parameters of efficient source of excimer radiation generated in rare gases/chlorine mixtures are investigated by OES. |
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