Deposition and Characterisation of Nanostructured  silicon-oxide Containing Diamond-like Carbon Coatings

Buršíková,  Vilma; Zajíčková,  Lenka; Franta,  Daniel; Janča,  Jan; Buršík,  Jiří; Klapetek,  Petr; Bláhová, Olga; Peřina,  Vratislav; Navrátil,  Vladislav

Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings

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Authors	BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka FRANTA Daniel JANČA Jan BURŠÍK Jiří KLAPETEK Petr BLÁHOVÁ Olga PEŘINA Vratislav NAVRÁTIL Vladislav
Year of publication	2006
Type	Article in Proceedings
Conference	7th International Balkan Workshop on Applied Physics - Abstracts
MU Faculty or unit	Faculty of Education
Citation
Field	Plasma physics
Keywords	PECVD; Nanostructured silicon-oxide Containing Diamond-like Carbon; thin films; mechanical properties; tribological properties;RBS; ERDA;
Description	Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings was studied in this work by means of measurements of mechanical, optical and electrical properties of Thin Films.
Related projects:	Synthesis of carbon micro- and nanostructures by plasma technologies Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials