Influence of Oxygen Admixture on Nitrogen Capacitively Coupled Discharge

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Authors	DVOŘÁK Pavel VAŠINA Petr KUDRLE Vít TÁLSKÝ Antonín
Year of publication	2006
Type	Article in Proceedings
Conference	Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on Atomic and Molecular Physics of Ionised Gases
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	nitrogen; oxygen; capacitively coupled discharge
Description	Study of capacitively coupled discharge ignited in nitrogen with small amount of oxygen by means of OES, Langmuir probe and mass spectroscopy techniques, proceeding
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Study of kinetic processes in nitrogen post-discharge with respect to their use in chemical analysis