REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD

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Authors	MUSA G. MUSTATA I. LUNGU C.P. SURDU BOB C. VLADOIU R. BURŠÍKOVÁ Vilma
Year of publication	2005
Type	Article in Proceedings
Conference	17th ISPC
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	REFRACTORY METAL; FILM DEPOSITION; THERMIONIC VACUUM ARC METHOD
Description	REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Multiscale approach to relationships between mechanical and microstructural characteristics of materials