Fourier components of plasma potential in hydrogen capacitively coupled rf discharge
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Proceedings |
| Conference | Proceedings of XXVII International Conference on Phenomena in Ionized Gases |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma potential harmonic hydrogen |
| Description | We measured the amplitudes of the fundamental and higher harmonics of the plasma potential in a low-pressure high frequency (13.56 MHz) hydrogen capacitively coupled discharge. Their dependencies on the position in the discharge and pressure are presented. |
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