Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	DVOŘÁK Pavel JÁNSKÝ Jaroslav ZAJÍČKOVÁ Lenka JANČA Jan
Year of publication	2005
Type	Article in Proceedings
Conference	SAPP XV - Book of contributed papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	IEDF hydrogen capacitive plasma low-pressure
Description	The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented.
Related projects:	Pokročilé směry ve fyzice a chemii plazmatu Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates