Deposition of polymer films in diffuse coplanar surface discharge
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of 16th ISPC |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Deposition; polymer films;coplanar discharge |
| Description | Deposition of polymer films in diffuse coplanar surface discharge |
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