Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | WDS'03 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon |
| Description | Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films |
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