Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors

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Authors	ELIÁŠ Marek ŽÍLA Jaromír JANČA Jan BROŽEK Vlastimil
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Czech. Jourmal of Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	tungsten; titaniun; plasma; ICP
Description	Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
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