Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

Sládek,  Petr; Sťahel,  Pavel

Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

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Authors	SLÁDEK Petr SŤAHEL Pavel
Year of publication	2002
Type	Article in Proceedings
Conference	Conference Proceedings of Inter-Academia 2002
MU Faculty or unit	Faculty of Education
Citation
Field	Plasma physics
Keywords	plasma deposition;surface energy; atmospheric discharge
Description	Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates