Deposition of hard carbon films and its diagnostics

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Authors	FRGALA Zdeněk KUDRLE Vít JANČA Jan TÁLSKÝ Antonín
Year of publication	2001
Type	Article in Proceedings
Conference	Juniormat'01
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Description	Deposition of hard carbon films and its diagnostics
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates