Determination of Mechanical Properties of Thin Films by the Indentation Techniques

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	BURŠÍKOVÁ Vilma NAVRÁTIL Vladislav
Year of publication	2001
Type	Article in Proceedings
Conference	New Trends in Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	thin films; mechanical properties; DSI-test; nanoindentation; AFM
Description	In the present paper the indentation techniques as a powerful thin film characterisation tools will be introduced. The objective of our study is to determine the mechanical properties of a number of different coating-substrate systems by means of both micro and nanoindentation techniques.
Related projects:	Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates