The deposition process based on silicon-organic compounds (HMDSO, TEOS) in two different types of an atmospheric barrier discharge

• Authors: SONNENFELD Axel; TUN T. M.; ZAJÍČKOVÁ Lenka; WAGNER Hans-Erich; BEHNKE J. B.; HIPPLER R.
• Year of publication: 2001
• Type: Article in Proceedings
• Conference: Proceedings of 15th International Symposium on Plasma Chemistry
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Description: The deposition process based on silicon-organic compounds (HMDSO, TEOS) in two different types of an atmospheric barrier discharge

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