Preparation of enhanced CN-based hard coatings by PECVD

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Authors	ELIÁŠ Marek ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma KUDRLE Vít KLAPETEK Petr JANČA Jan
Year of publication	2001
Type	Article in Proceedings
Conference	Proceedings of 15th International Symposium on Plasma Chemistry
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Attached files	ispc01.zip
Description	Preparation of enhanced CN-based hard coatings by PECVD
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates