Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

• Authors: MIKULÍK Petr; JERGEL M.; BAUMBACH T.; MAJKOVÁ E.; PINČÍK E.; LUBY Š.; ORTEGA L.; TUCOULOU R.; HUDEK P.; KOSTIČ I.
• Year of publication: 2001
• Type: Article in Periodical
• Magazine / Source: J. Phys. D: Appl. Phys.
• MU Faculty or unit: Faculty of Science
• web: http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001
• Field: Solid matter physics and magnetism
• Keywords: reflectivity; xrr; x-uv optics; gratings; w/si; x-ray
• Description: Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.

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