Optical diagnostics of inductively coupled  RF discharge

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	ELIÁŠ Marek KUDRLE Vít BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	2001
Type	Article in Proceedings
Conference	SAPP 13th Symposium Proceedings
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Optical diagnostics; inductively coupled RF discharge
Description	Optical diagnostics of inductively coupled RF discharge
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Hard and superhard coatings prepared by unconventional plasma processes Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates