Deposits from Hexamethyldisiloxane in a Dielectric Barrier Discharge at Atmospheric Pressure

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Authors	SONNENFELD Axel TUN T. M. ZAJÍČKOVÁ Lenka WAGNER Hans-Erich BEHNKE J. F. HIPPLER R.
Year of publication	2000
Type	Article in Proceedings
Conference	Proceedings of HAKONE VII
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Description	Deposits from Hexamethyldisiloxane in a Dielectric Barrier Discharge at Atmospheric Pressure
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