Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films

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Authors	ELIÁŠ Marek KUDRLE Vít BURŠÍKOVÁ Vilma JANČA Jan
Year of publication	2000
Type	Article in Proceedings
Conference	Proceedings of 20th Summer School and International Symposium on the Physics of Ionized Gases
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Description	Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films
Related projects:	Common laboratories for applied plasma physics and plasma chemistry in PřF and PedF MU, VA Brno and ÚFP AV ČR in Prague Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Hard and superhard coatings prepared by unconventional plasma processes Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates