Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

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Authors	ELIÁŠ Marek ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal
Year of publication	2000
Type	Article in Periodical
Magazine / Source	Diamond and Related Materials
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Carbon; Ellipsometry; Nitrides; Mechanical properties
Description	Nanocomposite CNx/SiO thin films
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