Degradation of mechanical properties of nitrogen-doped organosilicon plasma polymers induced by post-deposition reactions

Investor logo

Warning

This publication doesn't include Institute of Computer Science. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

PŘIBYL Roman VÁCLAVIK Richard KELAROVÁ Štěpánka HOMOLA Vojtěch STUPAVSKÁ Monika BURŠÍKOVÁ Vilma

Year of publication 2025
Type Article in Periodical
Magazine / Source Surfaces and Interfaces
MU Faculty or unit

Faculty of Science

Citation
web https://www.sciencedirect.com/science/article/pii/S2468023025015895
Doi https://doi.org/10.1016/j.surfin.2025.107337
Keywords HMDSO; Plasma polymers; Aging; Microindentation; Differential hardness; Chemical composition
Description Organosilicon plasma-polymer coatings based on hexamethyldisiloxane (HMDSO) are versatile materials with a wide range of applications. However, the degradation of their mechanical properties has not been extensively studied, despite growing application-oriented interest. This study focuses on evaluating the aging of mechanical properties in plasma-polymerized hexamethyldisiloxane (ppHMDSO) coatings, driven by structural changes over time. We investigate the chemical interactions of nitrogen-doped organosilicon thin films with ambient atmosphere under controlled laboratory conditions. These films were prepared via plasma-enhanced chemical vapor deposition (PECVD) using a capacitively coupled radio-frequency (RF) glow discharge in a mixture of HMDSO and N2. To assess the time-dependent mechanical properties of these rapidly degrading plasma polymers, nanoindentation and microindentation techniques were employed. Quasi-static partial unloading (QSpul) experiments and differential hardness (HD) measurements were also conducted to analyze how mechanical properties evolve with structural changes during aging. Trends in the mechanical properties were correlated with FTIR and XPS analyses to provide insights into the underlying aging mechanisms of nitrogen-doped HMDSO thin films.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info