RF discharges at atmospheric pressure

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Authors	BRABLEC Antonín KAPIČKA Vratislav ONDRÁČEK Zdeněk SLAVÍČEK Pavel STŘECHA Milan ŠŤASTNÝ František VACULÍK Robert ŠÍCHA Miloš
Year of publication	1999
Type	Article in Periodical
Magazine / Source	Czech. Journal of Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma physics; RF discharges; optical diagnostics
Description	The experiments with RF discharge showed that it could reoresent a usefull tool for the plasma - aided surface treatment technology. In the contribution basic properties of the discharge are presented.
Related projects:	Theoretical and experimental study of low temperature non-equilibrium plasma of HF discharges in mixture of air and water vapour Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates