X-ray scattering study of interface roughness correlation in Mo/Si and Ti/C multilayers for X-UV optics

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Authors	JERGEL M. HOLÝ Václav MAJKOVÁ E. LUBY S. SENDERÁK R. STOCK H.J. MENKE D. KLEINEBERG U. HEINZMANN U.
Year of publication	1998
Type	Article in Periodical
Magazine / Source	Physica B condensed matter
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Laboratory of thin films and nanostructures