Depozice a charakterizace tenkých BN vrstev v dusíkovém mikrovlnném a čpavkovém dohasínajícím výboji

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Title in English	Deposition and characterization of BN thin films in microwave N2 and NH3 afterglow
Authors	ELIÁŠ Marek JANČA Jan
Year of publication	1997
Type	Chapter of a book
MU Faculty or unit	Faculty of Science
Citation
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates