OVĚŘENÁ TECHNOLOGIE - Průmyslová příprava TiZrN vrstev

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Title in English	Proven technology - Industrial deposition of TiZrN coatings
Authors	SOCHORA Vjačeslav VAŠINA Petr
Year of publication	2021
Type	Pilot plant, certified technology, variety, breed
MU Faculty or unit	Faculty of Science
Description	The deposition technology of Ti_Zr_N coatings with enhanced fracture toughness is based on reactive magnetron sputtering of a rotating cylindrical target composed of titanium (Ti) and zirconium (Zr) segments.
Related projects:	Vývoj průmyslové technologie pro depozice tvrdých XBC a TiXN povlaků se zvýšenou lomovou houževnatostí