Antireflexní vrstva (SiO2/Al2O3/MgF2) pro dalekou ultrafialovou (FUV, VUV) oblast spektra na vlnové délce 193nm
| Title in English | Antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm |
|---|---|
| Authors | |
| Year of publication | 2014 |
| Type | Outcomes put into operation (prototype, working sample) |
| MU Faculty or unit | |
| Description | *Triple-layer antireflection coating (SiO2/Al2O3/MgF2) for the far ultraviolet (FUV, VUV) region of the spectrum at the wavelength of 193nm |
| Related projects: |