Interakce supersonické plazmové trysky ve vf plazmochemickémreaktoru s podložkou

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Title in English	The interaction of the supersonic plasma jet with the substrate in the RF plasma chemical reactor
Authors	ŠÍCHA Miloš KAPIČKA Vratislav
Year of publication	1996
Type	Article in Periodical
Magazine / Source	Contributions to Plasma Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates