Structural characterization of reactive ion-etched semicond uctor nanostructures using x-ray reciprocal space mapping

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Authors	BAUER G. DARHUBER A. HOLÝ Václav
Year of publication	1996
Type	Article in Periodical
Magazine / Source	Mat. Res. Soc. Symp. Proc.
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Physical properties of new materials and layered structures