Mechanical properties of the tungsten thin film deposited by thermionic vacuum arc (TVA) method

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Authors	MUSA G. LUNGU C.P. CIUPINA V. BURŠÍKOVÁ Vilma VLADOIU Rodica
Year of publication	2006
Type	Article in Proceedings
Conference	Abstracts of Invited Lectures and Contributed Papers, 18th Europhysics Conference on Atomic and Molecular Physics of Ionized Gases
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Mechanical properties; tungsten; thin film; thermionic vacuum arc (TVA)
Description	The aim of the present article is to study the mechanical properties of the tungsten thin film deposited by thermionic vacuum arc (TVA) method
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface